Descripción del título
MEMS mechanical sensors [St...
Monografía
monografia Rebiun17018365 https://catalogo.rebiun.org/rebiun/record/Rebiun17018365 040308s2004 maua sb 001 0 eng d 1580538738 1580535364 alk. paper) UPM 991005318919704212 ULPGC0308606 CBUC 991025137029706706 UPCT u91094 CaPaEBR. CaPaEBR. UMA.RE MEMS mechanical sensors Recurso electrónico] Stephen Beeby ... [et al Boston Artech House c2004 Boston Boston Artech House x, 269 p. ill x, 269 p. E-Libro Artech House microelectromechanical systems (MEMS) series Includes bibliographical references and index Electronic reproduction. Palo Alto, Calif. ebrary 2005. Available via World Wide Web. Access may be limited to ebrary affiliated libraries Modo de Acceso: World Wide Web E-Libro Sistemas microelectromecánicos Detectores Beeby, Stephen E-Libro (Servicio en línea) Microelectromechanical systems series